brantyu的分析正确。原文句子结构分析如下:
grinding the rear surface of the wafer,
while retaining the outer surface of the wafer(to which the annular protective
member is bonded) on a chuck table of a grinding device.
说明:to which...... 修饰the outer surface of the wafer,
grinding和retaining由while并列。
After the rear surface grinding step is carried out,
a step of forming a film on the rear surface of the wafer( to the outer surface of which the annular protective member is bonded), and a step of conducting a probe test on the devices are carried out.
说明:即after the rear surface grinding step is carried out, a step of......and a step of...... are carried out.
to the outer surface of which......修饰wafer. |